Inventor
ERMEZ SEMA
US6 patents
Patents
6 patentsUS10573522B2Feb 25, 2020
Method for preventing line bending during metal fill process
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US11355345B2Jun 7, 2022
Method for preventing line bending during metal fill process
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US12362188B2Jul 15, 2025
Method for preventing line bending during metal fill process
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US12237221B2Feb 25, 2025
Nucleation-free tungsten deposition
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US12077858B2Sep 3, 2024
Tungsten deposition
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US12060639B2Aug 13, 2024
Rapid flush purging during atomic layer deposition
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