Inventor
CHEW PETER
US8 patents
⚠️ This page may combine multiple inventors who share the name “CHEW PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
6 patentsUS5858876AJan 12, 1999
Simultaneous deposit and etch method for forming a void-free and gap-filling insulator layer upon a patterned substrate layer
CHARTERED SEMICONDUCTOR MFG338 citations97
US6451687B1Sep 17, 2002
Intermetal dielectric layer for integrated circuits
CHARTERED SEMICONDUCTOR MFG19 citations91
US6258676B1Jul 10, 2001
Method for forming a shallow trench isolation using HDP silicon oxynitride
CHARTERED SEMICONDUCTOR MFG37 citations91
US6383922B1May 7, 2002
Thermal stability improvement of CoSi2 film by stuffing in titanium
CHARTERED SEMICONDUCTOR MFG8 citations72
US5618756AApr 8, 1997
Selective WSix deposition
CHARTERED SEMICONDUCTOR MFG7 citations72
US6528886B2Mar 4, 2003
Intermetal dielectric layer for integrated circuits
CHARTERED SEMICONDUCTOR MFG2 citations61