Inventor

TABARELLI WERNER

9 patents

⚠️ This page may combine multiple inventors who share the name “TABARELLI WERNER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TABARELLI WERNER

5 patents

US4509852AApr 9, 1985

Apparatus for the photolithographic manufacture of integrated circuit elements

TABARELLI WERNER1,584 citations97

US4346164AAug 24, 1982

Photolithographic method for the manufacture of integrated circuits

TABARELLI WERNER1,769 citations97

US5146284ASep 8, 1992

Interferometer gas flow system

TABARELLI WERNER43 citations90

US5359415AOct 25, 1994

Interferometer for determining the position of displacement travel of a movable measuring mirror or the like

TABARELLI WERNER14 citations72

US5329356AJul 12, 1994

Interferometer head and interferometer arrangement with rigid support structure

TABARELLI WERNER15 citations71

PERKIN ELMER CENSOR

4 patents

US4592648AJun 3, 1986

Device for projection copying of masks onto a workpiece

PERKIN ELMER CENSOR12 citations72

US4592650AJun 3, 1986

Apparatus for projecting a pattern on a semiconductor substrate

PERKIN ELMER CENSOR5 citations61

US4621922ANov 11, 1986

Device for the projection copying of masks onto a workpiece

PERKIN ELMER CENSOR6 citations60

US4619524AOct 28, 1986

Device for the projection copying of masks

PERKIN ELMER CENSOR3 citations60