Inventor
HARAICHI SATOSHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “HARAICHI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
19 patentsUS5055696AOct 8, 1991
Multilayered device micro etching method and system
HITACHI LTD207 citations99
US6753253B1Jun 22, 2004
Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams
HITACHI LTD97 citations98
US5683547ANov 4, 1997
Processing method and apparatus using focused energy beam
HITACHI LTD156 citations97
US5358806AOct 25, 1994
Phase shift mask, method of correcting the same and apparatus for carrying out the method
HITACHI LTD70 citations96
US5223109AJun 29, 1993
Ion beam processing method and apparatus
HITACHI LTD52 citations96
US5086015AFeb 4, 1992
Method of etching a semiconductor device by an ion beam
HITACHI LTD75 citations96
US4900695AFeb 13, 1990
Semiconductor integrated circuit device and process for producing the same
HITACHI LTD151 citations96
US4868068ASep 19, 1989
IC wiring connecting method and resulting article
HITACHI LTD59 citations96
US5497034AMar 5, 1996
IC wiring connecting method and apparatus
HITACHI LTD22 citations92
US5447614ASep 5, 1995
Method of processing a sample using a charged beam and reactive gases and system employing the same
HITACHI LTD31 citations92
US5439763AAug 8, 1995
Optical mask and method of correcting the same
HITACHI LTD24 citations92
US5342448AAug 30, 1994
Apparatus for processing a sample using a charged beam and reactive gases
HITACHI LTD39 citations92
US5229607AJul 20, 1993
Combination apparatus having a scanning electron microscope therein
HITACHI LTD47 citations92
US5026664AJun 25, 1991
Method of providing a semiconductor IC device with an additional conduction path
HITACHI LTD35 citations92
US4933565AJun 12, 1990
Method and apparatus for correcting defects of X-ray mask
HITACHI LTD43 citations92
US4925755AMay 15, 1990
Method of correcting defect in circuit pattern
HITACHI LTD40 citations92
US4683378AJul 28, 1987
Apparatus for ion beam work
HITACHI LTD46 citations92
US5472507ADec 5, 1995
IC wiring connecting method and apparatus
HITACHI LTD19 citations82
US5824598AOct 20, 1998
IC wiring connecting method using focused energy beams
HITACHI LTD9 citations74