P

Inventor

HARAICHI SATOSHI

JP20 patents
⚠️ This page may combine multiple inventors who share the name “HARAICHI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

19 patents
US5055696AOct 8, 1991

Multilayered device micro etching method and system

HITACHI LTD207 citations99
US6753253B1Jun 22, 2004

Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams

HITACHI LTD97 citations98
US5683547ANov 4, 1997

Processing method and apparatus using focused energy beam

HITACHI LTD156 citations97
US5358806AOct 25, 1994

Phase shift mask, method of correcting the same and apparatus for carrying out the method

HITACHI LTD70 citations96
US5223109AJun 29, 1993

Ion beam processing method and apparatus

HITACHI LTD52 citations96
US5086015AFeb 4, 1992

Method of etching a semiconductor device by an ion beam

HITACHI LTD75 citations96
US4900695AFeb 13, 1990

Semiconductor integrated circuit device and process for producing the same

HITACHI LTD151 citations96
US4868068ASep 19, 1989

IC wiring connecting method and resulting article

HITACHI LTD59 citations96
US5497034AMar 5, 1996

IC wiring connecting method and apparatus

HITACHI LTD22 citations92
US5447614ASep 5, 1995

Method of processing a sample using a charged beam and reactive gases and system employing the same

HITACHI LTD31 citations92
US5439763AAug 8, 1995

Optical mask and method of correcting the same

HITACHI LTD24 citations92
US5342448AAug 30, 1994

Apparatus for processing a sample using a charged beam and reactive gases

HITACHI LTD39 citations92
US5229607AJul 20, 1993

Combination apparatus having a scanning electron microscope therein

HITACHI LTD47 citations92
US5026664AJun 25, 1991

Method of providing a semiconductor IC device with an additional conduction path

HITACHI LTD35 citations92
US4933565AJun 12, 1990

Method and apparatus for correcting defects of X-ray mask

HITACHI LTD43 citations92
US4925755AMay 15, 1990

Method of correcting defect in circuit pattern

HITACHI LTD40 citations92
US4683378AJul 28, 1987

Apparatus for ion beam work

HITACHI LTD46 citations92
US5472507ADec 5, 1995

IC wiring connecting method and apparatus

HITACHI LTD19 citations82
US5824598AOct 20, 1998

IC wiring connecting method using focused energy beams

HITACHI LTD9 citations74

HARA SHIRO

1 patent