Inventor

KERR DAVID R

US3 patents

⚠️ This page may combine multiple inventors who share the name “KERR DAVID R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US5472565ADec 5, 1995

Topology induced plasma enhancement for etched uniformity improvement

LAM RES CORP53 citations94

US5714031AFeb 3, 1998

Topology induced plasma enhancement for etched uniformity improvement

LAM RES CORP11 citations71

(unassigned)

1 patent

US5725224AMar 10, 1998

Lower leg rolling apparatus

27 citations86