Inventor
SHAO XIE
US17 patents
Patents
17 patentsUS5693691ADec 2, 1997
Thermosetting anti-reflective coatings compositions
BREWER SCIENCE INC166 citations98
US5919599AJul 6, 1999
Thermosetting anti-reflective coatings at deep ultraviolet
BREWER SCIENCE INC157 citations96
US7026237B2Apr 11, 2006
Fill material for dual damascene processes
BREWER SCIENCE INC60 citations95
US6391472B1May 21, 2002
Fill material for dual damascene processes
BREWER SCIENCE INC45 citations95
US6080530AJun 27, 2000
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
BREWER SCIENCE INC39 citations95
US5935760AAug 10, 1999
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
BREWER SCIENCE INC84 citations95
US5919598AJul 6, 1999
Method for making multilayer resist structures with thermosetting anti-reflective coatings
BREWER SCIENCE INC62 citations95
US6316160B1Nov 13, 2001
Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders
BREWER SCIENCE INC33 citations92
US6042990AMar 28, 2000
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
BREWER SCIENCE INC24 citations91
US5892096AApr 6, 1999
Non-subliming mid-UV dyes and ultra-thin organic arcs having differential solubility
BREWER SCIENCE INC36 citations91
US5688987ANov 18, 1997
Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility
BREWER SCIENCE INC26 citations91
US7132216B2Nov 7, 2006
Non-aromatic chromophores for use in polymer anti-reflective coatings
BREWER SCIENCE INC12 citations83
US6962769B2Nov 8, 2005
Anti-reflective coating composition with improved spin bowl compatibility
BREWER SCIENCE INC16 citations81
US6670425B2Dec 30, 2003
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
BREWER SCIENCE INC9 citations73
US6663916B2Dec 16, 2003
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
BREWER SCIENCE INC5 citations73
US8865599B2Oct 21, 2014
Self-leveling planarization materials for microelectronic topography
BREWER SCIENCE INC3 citations60
US7998318B2Aug 16, 2011
Crosslinkable fill compositions for uniformly protecting via and contact holes
BREWER SCIENCE INC0 citations51