Inventor
LO CHIWOEI WAYNE
US15 patents
⚠️ This page may combine multiple inventors who share the name “LO CHIWOEI WAYNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6566897B2May 20, 2003
Voltage contrast method and apparatus for semiconductor inspection using low voltage particle beam
APPLIED MATERIALS INC79 citations98
US6509750B1Jan 21, 2003
Apparatus for detecting defects in patterned substrates
APPLIED MATERIALS INC118 citations98
US7253645B2Aug 7, 2007
Detection of defects in patterned substrates
APPLIED MATERIALS INC76 citations97
US6750455B2Jun 15, 2004
Method and apparatus for multiple charged particle beams
APPLIED MATERIALS INC42 citations96
US6539106B1Mar 25, 2003
Feature-based defect detection
APPLIED MATERIALS INC434 citations94
US6504393B1Jan 7, 2003
Methods and apparatus for testing semiconductor and integrated circuit structures
APPLIED MATERIALS INC130 citations94
US7262418B2Aug 28, 2007
Method and apparatus for multiple charged particle beams
APPLIED MATERIALS INC14 citations92
US7067809B2Jun 27, 2006
Method and apparatus for multiple charged particle beams
APPLIED MATERIALS INC29 citations92
US6914441B2Jul 5, 2005
Detection of defects in patterned substrates
APPLIED MATERIALS INC17 citations92
SCHLUMBERGER TECHNOLOGIES INC
6 patentsUS6344750B1Feb 5, 2002
Voltage contrast method for semiconductor inspection using low voltage particle beam
SCHLUMBERGER TECHNOLOGIES INC217 citations99
US6232787B1May 15, 2001
Microstructure defect detection
SCHLUMBERGER TECHNOLOGIES INC249 citations99
US6252412B1Jun 26, 2001
Method of detecting defects in patterned substrates
SCHLUMBERGER TECHNOLOGIES INC344 citations98
US6091249AJul 18, 2000
Method and apparatus for detecting defects in wafers
SCHLUMBERGER TECHNOLOGIES INC236 citations96
US6252705B1Jun 26, 2001
Stage for charged particle microscopy system
SCHLUMBERGER TECHNOLOGIES INC65 citations93
US5920073AJul 6, 1999
Optical system
SCHLUMBERGER TECHNOLOGIES INC11 citations73