Inventor
GOECKNER MATTHEW
US3 patents
Patents
3 patentsUS6020592AFeb 1, 2000
Dose monitor for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT155 citations96
US6300643B1Oct 9, 2001
Dose monitor for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT60 citations94
US6528805B2Mar 4, 2003
Dose monitor for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT17 citations91