Inventor
HORIE YASUHIKO
JP4 patents
Patents
4 patentsUS6287984B1Sep 11, 2001
Apparatus and method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP26 citations88
US5928428AJul 27, 1999
Apparatus and method for manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP51 citations88
US5882418AMar 16, 1999
Jig for use in CVD and method of manufacturing jig for use in CVD
MITSUBISHI ELECTRIC CORP15 citations72
US6594182B1Jul 15, 2003
Semiconductor memory device having controlled impurity concentration profile, method for manufacturing thereof, and semiconductor manufacturing apparatus
MITSUBISHI ELECTRIC CORP1 citations48