Inventor
IWABUCHI YUKO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “IWABUCHI YUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
12 patentsUS6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US5894124AApr 13, 1999
Scanning electron microscope and its analogous device
HITACHI LTD61 citations96
US6452178B2Sep 17, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD23 citations92
US6580074B1Jun 17, 2003
Charged particle beam emitting device
HITACHI LTD13 citations84
US6987265B2Jan 17, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD9 citations82
US7439506B2Oct 21, 2008
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD3 citations74
US7012252B2Mar 14, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD5 citations74
US6512227B2Jan 28, 2003
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam
HITACHI LTD10 citations74
US5668372ASep 16, 1997
Scanning electron microscope and its analogous device
HITACHI LTD9 citations74
US6541771B2Apr 1, 2003
Scanning electron microscope
HITACHI LTD11 citations73
US6225628B1May 1, 2001
Scanning electron microscope
HITACHI LTD8 citations73
US7232996B2Jun 19, 2007
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD0 citations52