Inventor
FUKUHARA SATORU
JP30 patents
⚠️ This page may combine multiple inventors who share the name “FUKUHARA SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
28 patentsUS6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US5608218AMar 4, 1997
Scanning electron microscope
HITACHI LTD69 citations96
US5838096ANov 17, 1998
Cathode having a reservoir and method of manufacturing the same
HITACHI LTD40 citations93
US5616926AApr 1, 1997
Schottky emission cathode and a method of stabilizing the same
HITACHI LTD43 citations93
US6452178B2Sep 17, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD23 citations92
US5834781ANov 10, 1998
Electron source and electron beam-emitting apparatus equipped with same
HITACHI LTD46 citations92
US5162240ANov 10, 1992
Method and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrate
HITACHI LTD47 citations92
US4600839AJul 15, 1986
Small-dimension measurement system by scanning electron beam
HITACHI LTD35 citations92
US4841191AJun 20, 1989
Piezoelectric actuator control apparatus
HITACHI LTD46 citations90
US6987265B2Jan 17, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD9 citations82
US4554455ANov 19, 1985
Potential analyzer
HITACHI LTD19 citations82
US4274035AJun 16, 1981
Field emission electron gun
HITACHI LTD28 citations82
US7439506B2Oct 21, 2008
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD3 citations74
US7012252B2Mar 14, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD5 citations74
US6512227B2Jan 28, 2003
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam
HITACHI LTD10 citations74
US4868394ASep 19, 1989
Charged particle detector
HITACHI LTD16 citations74
US4803430AFeb 7, 1989
Magnetic/electric field measuring device by means of an electron beam
HITACHI LTD8 citations74
US4687931AAug 18, 1987
Scanning electron microscope
HITACHI LTD7 citations74
US4670652AJun 2, 1987
Charged particle beam microprobe apparatus
HITACHI LTD19 citations74
US4629889ADec 16, 1986
Potential analyzer
HITACHI LTD17 citations74
US4581534AApr 8, 1986
Image display system for a stroboscopic scanning electron microscope
HITACHI LTD11 citations74
US4355232AOct 19, 1982
Apparatus for measuring specimen potential in electron microscope
HITACHI LTD17 citations74
US3945698AMar 23, 1976
Method of stabilizing emitted electron beam in field emission electron gun
HITACHI LTD14 citations74
US5093616AMar 3, 1992
Voltage measurement method using electron beam
HITACHI LTD12 citations73
US4605860AAug 12, 1986
Apparatus for focusing a charged particle beam onto a specimen
HITACHI LTD9 citations73
US5111141AMay 5, 1992
Magnetic field measurement optimization apparatus using a charged particle beam
HITACHI LTD7 citations72
US5160884ANov 3, 1992
Charged particle beam device
HITACHI LTD6 citations63
US7232996B2Jun 19, 2007
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD0 citations52