P

Inventor

NAGANO OSAMU

JP40 patents
⚠️ This page may combine multiple inventors who share the name “NAGANO OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

12 patents

TOSHIBA KK

10 patents
US6563308B2May 13, 2003

Eddy current loss measuring sensor, thickness measuring system, thickness measuring method, and recorded medium

TOSHIBA KK144 citations98
US7692163B2Apr 6, 2010

Charged particle beam apparatus, defect correcting method, etching method, deposition method, and charge preventing method

TOSHIBA KK8 citations84
US6940080B2Sep 6, 2005

Charged particle beam lithography system, lithography method using charged particle beam, method of controlling charged particle beam, and method of manufacturing semiconductor device

TOSHIBA KK12 citations84
US7095023B2Aug 22, 2006

Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device

TOSHIBA KK8 citations74
US7491945B2Feb 17, 2009

Charged particle beam apparatus, charged particle beam control method, substrate inspection method and method of manufacturing semiconductor device

TOSHIBA KK4 citations63
US7304320B2Dec 4, 2007

Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device

TOSHIBA KK6 citations63
US7109501B2Sep 19, 2006

Charged particle beam lithography system, pattern drawing method, and method of manufacturing semiconductor device

TOSHIBA KK6 citations63
US7047154B2May 16, 2006

Interconnection pattern inspection method, manufacturing method of semiconductor device and inspection apparatus

TOSHIBA KK4 citations63
US7640138B2Dec 29, 2009

Interconnection pattern inspection method, manufacturing method of semiconductor device and inspection apparatus

TOSHIBA KK0 citations52
US8357895B2Jan 22, 2013

Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method

TOSHIBA KK0 citations42

ASAHI CHEMICAL IND

3 patents

TOSHIBA MEMORY CORP

3 patents

NAGANO OSAMU

2 patents

UNIV KEIO

2 patents

ASAHI KASEI CHEMICALS CORP

1 patent

ASHAHI KASEI KOGYO KABUSHIKI K

1 patent

AMAKI YOSHIKIYO

1 patent

SHIROKI KOGYO CO LTD

1 patent

SPANSION LLC

1 patent

TOKYO SHIBAURA ELECTRIC CO

1 patent

KIOXIA CORP

1 patent

KADOWAKI MOTOKI

1 patent