Inventor
DOUGLAS MONTE A
US49 patents
Patents
49 patentsUS6024801AFeb 15, 2000
Method of cleaning and treating a semiconductor device including a micromechanical device
TEXAS INSTRUMENTS INC179 citations99
US5482564AJan 9, 1996
Method of unsticking components of micro-mechanical devices
TEXAS INSTRUMENTS INC168 citations99
US4855017AAug 8, 1989
Trench etch process for a single-wafer RIE dry etch reactor
TEXAS INSTRUMENTS INC320 citations99
US4807016AFeb 21, 1989
Dry etch of phosphosilicate glass with selectivity to undoped oxide
TEXAS INSTRUMENTS INC378 citations99
US4784720ANov 15, 1988
Trench etch process for a single-wafer RIE dry etch reactor
TEXAS INSTRUMENTS INC185 citations99
US4891303AJan 2, 1990
Trilayer microlithographic process using a silicon-based resist as the middle layer
TEXAS INSTRUMENTS INC211 citations98
US5868856AFeb 9, 1999
Method for removing inorganic contamination by chemical derivitization and extraction
TEXAS INSTRUMENTS INC156 citations96
US5868862AFeb 9, 1999
Method of removing inorganic contamination by chemical alteration and extraction in a supercritical fluid media
TEXAS INSTRUMENTS INC170 citations96
US5584938ADec 17, 1996
Electrostatic particle removal and characterization
TEXAS INSTRUMENTS INC53 citations96
US5520992AMay 28, 1996
Electrodes for high dielectric constant materials
TEXAS INSTRUMENTS INC81 citations96
US5431774AJul 11, 1995
Copper etching
TEXAS INSTRUMENTS INC76 citations96
US5238529AAug 24, 1993
Anisotropic metal oxide etch
TEXAS INSTRUMENTS INC57 citations96
US5122225AJun 16, 1992
Selective etch method
TEXAS INSTRUMENTS INC58 citations96
US5100499AMar 31, 1992
Copper dry etch process using organic and amine radicals
TEXAS INSTRUMENTS INC79 citations96
US4984039AJan 8, 1991
Tapered trench structure and process
TEXAS INSTRUMENTS INC58 citations96
US4711698ADec 8, 1987
Silicon oxide thin film etching process
TEXAS INSTRUMENTS INC91 citations96
US4702795AOct 27, 1987
Trench etch process
TEXAS INSTRUMENTS INC45 citations96
US4690729ASep 1, 1987
Tapered trench process
TEXAS INSTRUMENTS INC78 citations96
US4920073AApr 24, 1990
Selective silicidation process using a titanium nitride protective layer
TEXAS INSTRUMENTS INC67 citations95
US5460687AOct 24, 1995
Anisotropic liquid phase photochemical etch
TEXAS INSTRUMENTS INC23 citations93
US5312516AMay 17, 1994
Anisotropic tantalum pentoxide etch
TEXAS INSTRUMENTS INC21 citations93
US5279702AJan 18, 1994
Anisotropic liquid phase photochemical copper etch
TEXAS INSTRUMENTS INC31 citations93
US5238530AAug 24, 1993
Anisotropic titanate etch
TEXAS INSTRUMENTS INC40 citations93
US5010378AApr 23, 1991
Tapered trench structure and process
TEXAS INSTRUMENTS INC28 citations93
US4999320AMar 12, 1991
Method for suppressing ionization avalanches in a helium wafer cooling assembly
TEXAS INSTRUMENTS INC25 citations93
US4980020ADec 25, 1990
Local interconnect etch technique
TEXAS INSTRUMENTS INC24 citations93
US4957590ASep 18, 1990
Method for forming local interconnects using selective anisotropy
TEXAS INSTRUMENTS INC41 citations93
US4916511AApr 10, 1990
Trench structure and process
TEXAS INSTRUMENTS INC32 citations93
US4915777AApr 10, 1990
Method for etching tungsten
TEXAS INSTRUMENTS INC25 citations93
US4863559ASep 5, 1989
Method for forming local interconnects using chlorine bearing agents
TEXAS INSTRUMENTS INC33 citations93
US4793896ADec 27, 1988
Method for forming local interconnects using chlorine bearing agents
TEXAS INSTRUMENTS INC30 citations93
US4675073AJun 23, 1987
Tin etch process
TEXAS INSTRUMENTS INC45 citations93
US4654112AMar 31, 1987
Oxide etch
TEXAS INSTRUMENTS INC33 citations93
US4882008ANov 21, 1989
Dry development of photoresist
TEXAS INSTRUMENTS INC48 citations92
US4758305AJul 19, 1988
Contact etch method
TEXAS INSTRUMENTS INC29 citations91
US5695569ADec 9, 1997
Removal of metal contamination
TEXAS INSTRUMENTS INC13 citations74
US5565179AOct 15, 1996
Electrostatic particle removal and characterization
TEXAS INSTRUMENTS INC10 citations74
US5545290AAug 13, 1996
Etching method
TEXAS INSTRUMENTS INC14 citations74
US5374330ADec 20, 1994
Anisotropic barium strontium titanate etch
TEXAS INSTRUMENTS INC12 citations74
US5318662AJun 7, 1994
Copper etch process using halides
TEXAS INSTRUMENTS INC7 citations74
US5201989AApr 13, 1993
Anisotropic niobium pentoxide etch
TEXAS INSTRUMENTS INC17 citations74
US5041362AAug 20, 1991
Dry developable resist etch chemistry
TEXAS INSTRUMENTS INC17 citations74
US4855015AAug 8, 1989
Dry etch process for selectively etching non-homogeneous material bilayers
TEXAS INSTRUMENTS INC17 citations74
US6432317B1Aug 13, 2002
Method to produce masking
TEXAS INSTRUMENTS INC3 citations63
US6177358B1Jan 23, 2001
Photo-stimulated etching of CaF2
TEXAS INSTRUMENTS INC5 citations63
US5387497AFeb 7, 1995
High resolution lithography method using hydrogen developing reagent
TEXAS INSTRUMENTS INC2 citations63
US5316895AMay 31, 1994
Photolithographic method using non-photoactive resins
TEXAS INSTRUMENTS INC2 citations63
US5000820AMar 19, 1991
Methods and apparatus for etching mercury cadmium telluride
TEXAS INSTRUMENTS INC4 citations63
US5418114AMay 23, 1995
Anisotropic liquid phase photochemical mercury cadmium telluride etch
TEXAS INSTRUMENTS INC0 citations52