Inventor
DRECHSLER UTE
CH23 patents
⚠️ This page may combine multiple inventors who share the name “DRECHSLER UTE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
18 patentsUS6835589B2Dec 28, 2004
Three-dimensional integrated CMOS-MEMS device and process for making the same
IBM48 citations96
US6647766B2Nov 18, 2003
Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
IBM44 citations96
US7071031B2Jul 4, 2006
Three-dimensional integrated CMOS-MEMS device and process for making the same
IBM42 citations93
US12070307B2Aug 27, 2024
Electrically functional polymer microneedle array
IBM8 citations84
US7566939B2Jul 28, 2009
Fabrication of silicon micro-mechanical structures
IBM10 citations84
US7749915B2Jul 6, 2010
Protection of polymer surfaces during micro-fabrication
IBM8 citations83
US6862925B2Mar 8, 2005
Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
IBM12 citations81
US9869695B1Jan 16, 2018
Atomic-force microscope system with integrated fabry-perot resonator
IBM7 citations80
US6949397B2Sep 27, 2005
Fabrication of silicon micro mechanical structures
IBM6 citations74
US7146067B2Dec 5, 2006
Microsystem switches
IBM10 citations73
US6770558B2Aug 3, 2004
Selective filling of electrically conductive vias for three dimensional device structures
IBM11 citations73
US10546992B2Jan 28, 2020
Buried electrode geometry for lowering surface losses in superconducting microwave circuits
IBM2 citations69
US6995391B2Feb 7, 2006
Electrode structure for electronic and opto-electronic devices
IBM10 citations69
US10980448B2Apr 20, 2021
Electrically functional polymer microneedle array
IBM1 citations61
US11673798B2Jun 13, 2023
Microfluidic devices with electrodes formed as physically separated sections of microchannel side walls
IBM0 citations51
US8963661B2Feb 24, 2015
Four terminal nano-electromechanical switch with a single mechanical contact
IBM0 citations51
US8925183B2Jan 6, 2015
Methods for fabricating an electromechanical switch
IBM0 citations51
US11520228B2Dec 6, 2022
Mass fabrication-compatible processing of semiconductor metasurfaces
IBM0 citations47