Inventor

FEIJTS MAURICE WILHELMUS LEONARDUS HENDRICUS

NL4 patents

⚠️ This page may combine multiple inventors who share the name “FEIJTS MAURICE WILHELMUS LEONARDUS HENDRICUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US11982947B2May 14, 2024

Contamination trap

ASML NETHERLANDS BV0 citations56

US11556067B2Jan 17, 2023

Contamination trap

ASML NETHERLANDS BV1 citations56

US10018924B2Jul 10, 2018

Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

ASML NETHERLANDS BV1 citations51

LAFARRE RAYMOND WILHELMUS LOUIS

1 patent

US9256139B2Feb 9, 2016

Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

LAFARRE RAYMOND WILHELMUS LOUIS3 citations71