Inventor
GOPALAN PERIYA
US19 patents
⚠️ This page may combine multiple inventors who share the name “GOPALAN PERIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS9421666B2Aug 23, 2016
Printed chemical mechanical polishing pad having abrasives therein
APPLIED MATERIALS INC49 citations98
US10016877B2Jul 10, 2018
Printed chemical mechanical polishing pad having abrasives therein and system for printing
APPLIED MATERIALS INC14 citations92
US11794308B2Oct 24, 2023
Printed chemical mechanical polishing pad having particles therein
APPLIED MATERIALS INC0 citations62
US12330260B2Jun 17, 2025
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations60
US11618124B2Apr 4, 2023
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations60
US10744618B2Aug 18, 2020
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations50
US9731397B2Aug 15, 2017
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations50
US8961266B2Feb 24, 2015
Polishing pad with secondary window seal
APPLIED MATERIALS INC0 citations50
SPEEDFAM IPEC CORP
8 patentsUS6685537B1Feb 3, 2004
Polishing pad window for a chemical mechanical polishing tool
SPEEDFAM IPEC CORP56 citations94
US6213853B1Apr 10, 2001
Integral machine for polishing, cleaning, rinsing and drying workpieces
SPEEDFAM IPEC CORP58 citations94
US6802955B2Oct 12, 2004
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface
SPEEDFAM IPEC CORP43 citations91
US6350177B1Feb 26, 2002
Combined CMP and wafer cleaning apparatus and associated methods
SPEEDFAM IPEC CORP17 citations91
US6368183B1Apr 9, 2002
Wafer cleaning apparatus and associated wafer processing methods
SPEEDFAM IPEC CORP39 citations89
US6364745B1Apr 2, 2002
Mapping system for semiconductor wafer cassettes
SPEEDFAM IPEC CORP10 citations80
US6125861AOct 3, 2000
Post-CMP wet-HF cleaning station
SPEEDFAM IPEC CORP9 citations70
US6818604B2Nov 16, 2004
System and method for cleaning workpieces
SPEEDFAM IPEC CORP3 citations58