Inventor
BLAQUIERE RYAN
US6 patents
Patents
6 patentsUS10403474B2Sep 3, 2019
Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system
LAM RES CORP10 citations82
US11661654B2May 30, 2023
Substrate processing systems including gas delivery system with reduced dead legs
LAM RES CORP2 citations68
US10840061B2Nov 17, 2020
Substrate processing chamber including conical surface for reducing recirculation
LAM RES CORP1 citations61
US11959172B2Apr 16, 2024
Substrate processing systems including gas delivery system with reduced dead legs
LAM RES CORP0 citations57
US10648079B2May 12, 2020
Reducing backside deposition at wafer edge
LAM RES CORP0 citations40
US10301718B2May 28, 2019
Asymmetric pedestal/carrier ring arrangement for edge impedance modulation
LAM RES CORP0 citations40