Inventor
THRIDANDAM HAREESH
US9 patents
⚠️ This page may combine multiple inventors who share the name “THRIDANDAM HAREESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR PROD & CHEM
5 patentsUS7875312B2Jan 25, 2011
Process for producing silicon oxide films for organoaminosilane precursors
AIR PROD & CHEM48 citations93
US7678422B2Mar 16, 2010
Cyclic chemical vapor deposition of metal-silicon containing films
AIR PROD & CHEM12 citations83
US7064224B1Jun 20, 2006
Organometallic complexes and their use as precursors to deposit metal films
AIR PROD & CHEM15 citations83
US7265062B2Sep 4, 2007
Ionic additives for extreme low dielectric constant chemical formulations
AIR PROD & CHEM6 citations60
US7582574B2Sep 1, 2009
Diethylsilane as a silicon source in the deposition of metal silicate films
AIR PROD & CHEM0 citations49