Inventor
KIM MUNJUN
KR12 patents
Patents
12 patentsUS11393827B2Jul 19, 2022
Methods of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations82
US10748908B2Aug 18, 2020
Methods of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD7 citations82
US10566333B2Feb 18, 2020
Methods of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD8 citations82
US11882691B2Jan 23, 2024
Methods of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations71
US11791209B2Oct 17, 2023
Method of manufacturing a semiconductor device using a thermally decomposable layer, a semiconductor manufacturing apparatus, and the semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations70
US12369314B2Jul 22, 2025
Methods of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations61
US11581326B2Feb 14, 2023
Three-dimensional semiconductor memory device
SAMSUNG ELECTRONICS CO LTD1 citations59
US11482453B2Oct 25, 2022
Method of manufacturing a semiconductor device using a thermally decomposable layer, a semiconductor manufacturing apparatus, and the semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations59
US11764119B2Sep 19, 2023
Integrated circuit devices
SAMSUNG ELECTRONICS CO LTD0 citations57
US11264294B2Mar 1, 2022
Integrated circuit devices and manufacturing methods for the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12211795B2Jan 28, 2025
Semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations49
US12469779B2Nov 11, 2025
Semiconductor devices having a wiring provided with a protective layer
SAMSUNG ELECTRONICS CO LTD0 citations44