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Inventor
TAKASU SHINICHIRO
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “TAKASU SHINICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO SHIBAURA ELECTRIC CO
2 patents
US4479297A
Oct 30, 1984
Method of fabricating three-dimensional semiconductor devices utilizing CeO2 and ion-implantation.
TOKYO SHIBAURA ELECTRIC CO
42 citations
91
US4411013A
Oct 18, 1983
System for transferring a fine pattern onto a target
TOKYO SHIBAURA ELECTRIC CO
23 citations
80
VLSI TECHNOLOGY RES ASS
2 patents
US4291990A
Sep 29, 1981
Apparatus for measuring the distribution of irregularities on a mirror surface
VLSI TECHNOLOGY RES ASS
29 citations
90
US4378269A
Mar 29, 1983
Method of manufacturing a single crystal silicon rod
VLSI TECHNOLOGY RES ASS
18 citations
72
TOSHIBA CERAMICS CO
2 patents
US5287167A
Feb 15, 1994
Method for measuring interstitial oxygen concentration
TOSHIBA CERAMICS CO
10 citations
73
US5808745A
Sep 15, 1998
Method for measuring a substitutional carbon concentration
TOSHIBA CERAMICS CO
2 citations
62