Inventor
SHINOZAKI TOSHIAKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SHINOZAKI TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO SHIBAURA ELECTRIC CO
7 patentsUS4717645AJan 5, 1988
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO26 citations91
US4572956AFeb 25, 1986
Electron beam pattern transfer system having an autofocusing mechanism
TOKYO SHIBAURA ELECTRIC CO21 citations81
US5051338ASep 24, 1991
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO16 citations80
US4411013AOct 18, 1983
System for transferring a fine pattern onto a target
TOKYO SHIBAURA ELECTRIC CO23 citations80
US4467210AAug 21, 1984
Electron-beam image transfer device
TOKYO SHIBAURA ELECTRIC CO9 citations74
US4897337AJan 30, 1990
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO7 citations72
US4560278ADec 24, 1985
Fixed-slit type photoelectric microscope
TOKYO SHIBAURA ELECTRIC CO4 citations62
TOSHIBA KK
3 patentsUS4748327AMay 31, 1988
Method of inspecting masks and apparatus thereof
TOSHIBA KK37 citations88
US4469949ASep 4, 1984
Electron beam pattern transfer device and method for aligning mask and semiconductor wafer
TOSHIBA KK21 citations82
US5188924AFeb 23, 1993
Pattern forming method utilizing material with photoresist film underlayer and contrast enhancement overlayer containing photosensitive diazonium salt
TOSHIBA KK6 citations61