Inventor
TOMITA KAZUSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TOMITA KAZUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS5423936AJun 13, 1995
Plasma etching system
HITACHI LTD177 citations97
US5445709AAug 29, 1995
Anisotropic etching method and apparatus
HITACHI LTD84 citations95
US5593540AJan 14, 1997
Plasma etching system and plasma etching method
HITACHI LTD92 citations94
US5766498AJun 16, 1998
Anisotropic etching method and apparatus
HITACHI LTD31 citations92
US5880497AMar 9, 1999
Semiconductor integrated circuit device having capacitance element and process of manufacturing the same
HITACHI LTD18 citations91
US5508540AApr 16, 1996
Semiconductor integrated circuit device and process of manufacturing the same
HITACHI LTD30 citations91