Inventor
TOZAWA SHIGEKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TOZAWA SHIGEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5423936AJun 13, 1995
Plasma etching system
HITACHI LTD177 citations97
US5445709AAug 29, 1995
Anisotropic etching method and apparatus
HITACHI LTD84 citations95
US5593540AJan 14, 1997
Plasma etching system and plasma etching method
HITACHI LTD92 citations94
US5766498AJun 16, 1998
Anisotropic etching method and apparatus
HITACHI LTD31 citations92
TOKYO ELECTRON LTD
4 patentsUS6190495B1Feb 20, 2001
Magnetron plasma processing apparatus
TOKYO ELECTRON LTD81 citations95
US5779803AJul 14, 1998
Plasma processing apparatus
TOKYO ELECTRON LTD83 citations94
US5578164ANov 26, 1996
Plasma processing apparatus and method
TOKYO ELECTRON LTD30 citations91
US9466507B2Oct 11, 2016
Etching method, and recording medium
TOKYO ELECTRON LTD0 citations43