Inventor
IIMURO SHUNICHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “IIMURO SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6110287AAug 29, 2000
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD397 citations97
US4812201AMar 14, 1989
Method of ashing layers, and apparatus for ashing layers
TOKYO ELECTRON LTD481 citations96
US8343280B2Jan 1, 2013
Multi-zone substrate temperature control system and method of operating
TOKYO ELECTRON LTD48 citations93
US6589435B1Jul 8, 2003
Plasma etching method
TOKYO ELECTRON LTD5 citations62
HITACHI LTD
4 patentsUS5423936AJun 13, 1995
Plasma etching system
HITACHI LTD177 citations97
US5445709AAug 29, 1995
Anisotropic etching method and apparatus
HITACHI LTD84 citations95
US5593540AJan 14, 1997
Plasma etching system and plasma etching method
HITACHI LTD92 citations94
US5766498AJun 16, 1998
Anisotropic etching method and apparatus
HITACHI LTD31 citations92