Inventor
OCHIAI YUKINORI
JP7 patents
Patents
7 patentsUS7518247B2Apr 14, 2009
Semiconductor device and its manufacturing method
NEC CORP21 citations91
US6933569B2Aug 23, 2005
Soi mosfet
NEC CORP24 citations91
US7514197B2Apr 7, 2009
Resist and method of forming resist pattern
NEC CORP9 citations83
US5838468ANov 17, 1998
Method and system for forming fine patterns using hologram
NEC CORP10 citations71
US5736742AApr 7, 1998
Objective lens and charged particle beam system
NEC CORP10 citations71
US7767185B2Aug 3, 2010
Method of producing a carbon nanotube and a carbon nanotube structure
NEC CORP2 citations58
US5626921AMay 6, 1997
Method for forming photoluminescence layer on a semiconductor layer by ion irradiation
NEC CORP1 citations49