Inventor
TIEN TIEN
US3 patents
Patents
3 patentsUS5763319AJun 9, 1998
Process for fabricating semiconductor devices with shallowly doped regions using dopant compounds containing elements of high solid solubility
ADVANCED MATERIALS ENG60 citations93
US5863831AJan 26, 1999
Process for fabricating semiconductor device with shallow p-type regions using dopant compounds containing elements of high solid solubility
ADVANCED MATERIALS ENG20 citations90
US6109207AAug 29, 2000
Process for fabricating semiconductor device with shallow p-type regions using dopant compounds containing elements of high solid solubility
ADVANCED MATERIALS ENG4 citations71