Inventor

ZUHR RAYMOND A

US3 patents

⚠️ This page may combine multiple inventors who share the name “ZUHR RAYMOND A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MARTIN MARIETTA ENERGY SYSTEMS

2 patents

US5910220AJun 8, 1999

Apparatus and method for selective area deposition of thin films on electrically biased substrates

MARTIN MARIETTA ENERGY SYSTEMS11 citations68

US5354583AOct 11, 1994

Apparatus and method for selective area deposition of thin films on electrically biased substrates

MARTIN MARIETTA ENERGY SYSTEMS11 citations68

US ENERGY

1 patent

US4908334AMar 13, 1990

Method for forming metallic silicide films on silicon substrates by ion beam deposition

US ENERGY9 citations70