Inventor
GOLANSKI ANDRZEJ
FR2 patents
Patents
2 patentsUS5910220AJun 8, 1999
Apparatus and method for selective area deposition of thin films on electrically biased substrates
MARTIN MARIETTA ENERGY SYSTEMS11 citations68
US5354583AOct 11, 1994
Apparatus and method for selective area deposition of thin films on electrically biased substrates
MARTIN MARIETTA ENERGY SYSTEMS11 citations68