Inventor
EAGLESHAM DAVID JAMES
US3 patents
Patents
3 patentsUS6043139AMar 28, 2000
Process for controlling dopant diffusion in a semiconductor layer
LUCENT TECHNOLOGIES INC161 citations95
US5731626AMar 24, 1998
Process for controlling dopant diffusion in a semiconductor layer and semiconductor layer formed thereby
LUCENT TECHNOLOGIES INC173 citations95
US6136672AOct 24, 2000
Process for device fabrication using a high-energy boron implant
LUCENT TECHNOLOGIES INC24 citations88