Inventor
ESTES SCOTT A
US10 patents
⚠️ This page may combine multiple inventors who share the name “ESTES SCOTT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
9 patentsUS6191085B1Feb 20, 2001
Method for cleaning semiconductor devices
IBM17 citations92
US5962384AOct 5, 1999
Method for cleaning semiconductor devices
IBM40 citations92
US6162565ADec 19, 2000
Dilute acid rinse after develop for chrome etch
IBM22 citations90
US5459001AOct 17, 1995
Low stress electrodeposition of gold for x-ray mask fabrication
IBM18 citations80
US5318687AJun 7, 1994
Low stress electrodeposition of gold for X-ray mask fabrication
IBM13 citations72
US7332054B2Feb 19, 2008
Etch apparatus
IBM8 citations71
US6758912B2Jul 6, 2004
Method of inhibiting contaminants using dilute acid rinse
IBM3 citations60
US6494966B2Dec 17, 2002
Method of minimizing contaminating deposits using dilute acid rinse
IBM2 citations60
US7855130B2Dec 21, 2010
Corrosion inhibitor additives to prevent semiconductor device bond-pad corrosion during wafer dicing operations
IBM0 citations48