Inventor
WAGNER THOMAS M
US8 patents
⚠️ This page may combine multiple inventors who share the name “WAGNER THOMAS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS6162565ADec 19, 2000
Dilute acid rinse after develop for chrome etch
IBM22 citations90
US7014959B2Mar 21, 2006
CD uniformity of chrome etch to photomask process
IBM8 citations71
US7304000B2Dec 4, 2007
Photoresist trimming process
IBM5 citations69
US6758912B2Jul 6, 2004
Method of inhibiting contaminants using dilute acid rinse
IBM3 citations60
US6494966B2Dec 17, 2002
Method of minimizing contaminating deposits using dilute acid rinse
IBM2 citations60
US7960288B2Jun 14, 2011
Photoresist trimming process
IBM0 citations48
US7955988B2Jun 7, 2011
Photoresist trimming process
IBM0 citations48