Inventor
KOMURO MASAHIRO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KOMURO MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
5 patentsUS5949145ASep 7, 1999
Semiconductor device including alignment marks
NEC CORP56 citations95
US6326278B1Dec 4, 2001
Method of protecting an alignment mark when manufacturing a semiconductor device
NEC CORP23 citations92
US6316328B1Nov 13, 2001
Fabrication method for semiconductor device utilizing parallel alignment slits
NEC CORP15 citations83
US6261897B1Jul 17, 2001
Method of manufacturing a semiconductor device
NEC CORP7 citations73
US6288452B1Sep 11, 2001
Semiconductor device including registration accuracy marks
NEC CORP4 citations62
NEC ELECTRONICS CORP
4 patentsUS6876064B2Apr 5, 2005
Semiconductor device having superior resistance to moisture
NEC ELECTRONICS CORP36 citations92
US7019400B2Mar 28, 2006
Semiconductor device having multilayer interconnection structure and method for manufacturing the device
NEC ELECTRONICS CORP12 citations83
US6861759B2Mar 1, 2005
Semiconductor apparatus of which reliability of interconnections is improved and manufacturing method of the same
NEC ELECTRONICS CORP0 citations52
US7833909B2Nov 16, 2010
Method of manufacturing semiconductor device, and etching apparatus
NEC ELECTRONICS CORP1 citations51
TAKAHASHI NOBUAKI
4 patentsUS8102049B2Jan 24, 2012
Semiconductor device including through electrode and method of manufacturing the same
TAKAHASHI NOBUAKI6 citations73
US8791567B2Jul 29, 2014
Semiconductor device
TAKAHASHI NOBUAKI2 citations62
US8217516B2Jul 10, 2012
Semiconductor device and method of manufacturing the same
TAKAHASHI NOBUAKI2 citations62
US8426311B2Apr 23, 2013
Method and apparatus for manufacturing semiconductor device
TAKAHASHI NOBUAKI0 citations52