Inventor
CHAO SANDY S
US3 patents
Patents
3 patentsUS6299753B1Oct 9, 2001
Double pressure vessel chemical dispenser unit
APPLIED MATERIALS INC59 citations93
US6454927B1Sep 24, 2002
Apparatus and method for electro chemical deposition
APPLIED MATERIALS INC28 citations90
US7005046B2Feb 28, 2006
Apparatus for electro chemical deposition
APPLIED MATERIALS INC2 citations60