Inventor

NORBY JERRY R

US3 patents

Patents

3 patents

US6412502B1Jul 2, 2002

Wafer container cleaning system

SEMITOOL INC26 citations90

US6322633B1Nov 27, 2001

Wafer container cleaning system

SEMITOOL INC30 citations90

US6432214B2Aug 13, 2002

Cleaning apparatus

SEMITOOL INC17 citations86