Inventor
JAING CHENG-CHUNG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “JAING CHENG-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PREC INSTR DEV CT NAT SCIENCE
4 patentsUS6309895B1Oct 30, 2001
Method for fabricating capacitor containing amorphous and polycrystalline ferroelectric films and method for forming amorphous ferroelectric film
PREC INSTR DEV CT NAT SCIENCE62 citations93
US6466308B1Oct 15, 2002
Method for measuring a thermal expansion coefficient of a thin film by using phase shifting interferometry
PREC INSTR DEV CT NAT SCIENCE19 citations80
US6514814B2Feb 4, 2003
Capacitor containing amorphous and polycrystalline ferroelectric films and fabrication method therefor, and method for forming amorphous ferroelectric film
PREC INSTR DEV CT NAT SCIENCE2 citations60
US6493070B1Dec 10, 2002
Method for in-situ monitoring layer uniformity of sputter coating based on intensity distribution of plasma spectrum
PREC INSTR DEV CT NAT SCIENCE5 citations54