Inventor
THIELE JOERG
DE10 patents
⚠️ This page may combine multiple inventors who share the name “THIELE JOERG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
6 patentsUS6745380B2Jun 1, 2004
Method for optimizing and method for producing a layout for a mask, preferably for use in semiconductor production, and computer program therefor
INFINEON TECHNOLOGIES AG188 citations93
US6692875B2Feb 17, 2004
Mask for optical projection systems, and a process for its production
INFINEON TECHNOLOGIES AG7 citations72
US7393613B2Jul 1, 2008
Set of at least two masks for the projection of structure patterns
INFINEON TECHNOLOGIES AG7 citations70
US6493865B2Dec 10, 2002
Method of producing masks for fabricating semiconductor structures
INFINEON TECHNOLOGIES AG6 citations62
US7393614B2Jul 1, 2008
Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer
INFINEON TECHNOLOGIES AG3 citations60
US7354683B2Apr 8, 2008
Lithography mask for imaging of convex structures
INFINEON TECHNOLOGIES AG0 citations48