Inventor
RYU JUN-GYU
KR8 patents
Patents
8 patentsUS6652362B2Nov 25, 2003
Apparatus for polishing a semiconductor wafer and method therefor
SAMSUNG ELECTRONICS CO LTD21 citations91
US6840846B2Jan 11, 2005
Polishing station of a chemical mechanical polishing apparatus
SAMSUNG ELECTRONICS CO LTD16 citations83
US6945861B2Sep 20, 2005
Polishing head of chemical mechanical polishing apparatus and polishing method using the same
SAMSUNG ELECTRONICS CO LTD8 citations73
US6881135B2Apr 19, 2005
Polishing head of chemical mechanical polishing apparatus and polishing method using the same
SAMSUNG ELECTRONICS CO LTD5 citations73
US6769973B2Aug 3, 2004
Polishing head of chemical mechanical polishing apparatus and polishing method using the same
SAMSUNG ELECTRONICS CO LTD12 citations73
US7223158B2May 29, 2007
Method for polishing a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD4 citations72
US7081045B2Jul 25, 2006
Apparatus for polishing a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD7 citations72
US6921323B2Jul 26, 2005
Apparatus for polishing a semiconductor wafer and method therefor
SAMSUNG ELECTRONICS CO LTD7 citations72