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Inventor
EDAMATSU KUNISHIGE
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “EDAMATSU KUNISHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
2 patents
US5843616A
Dec 1, 1998
Positive resist composition
SUMITOMO CHEMICAL CO
2 citations
60
US7566522B2
Jul 28, 2009
Chemically amplified resist composition
SUMITOMO CHEMICAL CO
6 citations
59
SHIGEMATSU JUNJI
1 patent
US8298746B2
Oct 30, 2012
Chemically amplified positive resist composition
SHIGEMATSU JUNJI
0 citations
41