Inventor
LYMBEROPOULOS DIMITRIS
US9 patents
⚠️ This page may combine multiple inventors who share the name “LYMBEROPOULOS DIMITRIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS6521080B2Feb 18, 2003
Method and apparatus for monitoring a process by employing principal component analysis
APPLIED MATERIALS INC76 citations96
US6455437B1Sep 24, 2002
Method and apparatus for monitoring the process state of a semiconductor device fabrication process
APPLIED MATERIALS INC111 citations96
US6368975B1Apr 9, 2002
Method and apparatus for monitoring a process by employing principal component analysis
APPLIED MATERIALS INC90 citations96
US6085688AJul 11, 2000
Method and apparatus for improving processing and reducing charge damage in an inductively coupled plasma reactor
APPLIED MATERIALS INC52 citations94
US6625513B1Sep 23, 2003
Run-to-run control over semiconductor processing tool based upon mirror image target
APPLIED MATERIALS INC29 citations91
US6247425B1Jun 19, 2001
Method and apparatus for improving processing and reducing charge damage in an inductively coupled plasma reactor
APPLIED MATERIALS INC28 citations91
US7006205B2Feb 28, 2006
Method and system for event detection in plasma processes
APPLIED MATERIALS INC12 citations83
US7265382B2Sep 4, 2007
Method and apparatus employing integrated metrology for improved dielectric etch efficiency
APPLIED MATERIALS INC16 citations77