Inventor
BYUN CHULSOO
KR3 patents
Patents
3 patentsUS9315897B2Apr 19, 2016
Showerhead for film depositing vacuum equipment
BYUN CHULSOO492 citations95
US7156921B2Jan 2, 2007
Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rate
BYUN CHULSOO23 citations87
US7485339B2Feb 3, 2009
Method for chemical vapor deposition capable of preventing contamination and enhancing film growth rate
BYUN CHULSOO0 citations46