P

Inventor

TSAY CHERNG-SHYAN

TW11 patents
⚠️ This page may combine multiple inventors who share the name “TSAY CHERNG-SHYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

6 patents
US9870443B2Jan 16, 2018

Method and apparatus for integrated circuit mask patterning

TAIWAN SEMICONDUCTOR MFG CO LTD26 citations93
US10990744B2Apr 27, 2021

Method and apparatus for integrated circuit mask patterning

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US9026956B1May 5, 2015

Method of lithographic process evaluation

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US8972909B1Mar 3, 2015

OPC method with higher degree of freedom

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US8972912B1Mar 3, 2015

Structure for chip extension

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US11748549B2Sep 5, 2023

Method and apparatus for integrated circuit mask patterning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

TAIWAN SEMICONDUCTOR MFG

3 patents
US7778805B2Aug 17, 2010

Regression system and methods for optical proximity correction modeling

TAIWAN SEMICONDUCTOR MFG7 citations71
US9213233B2Dec 15, 2015

Photolithography scattering bar structure and method

TAIWAN SEMICONDUCTOR MFG3 citations58
US8048590B2Nov 1, 2011

Photolithography mask having a scattering bar structure that includes transverse linear assist features

TAIWAN SEMICONDUCTOR MFG0 citations52

CHANG CHIA-CHENG

1 patent
US8589830B2Nov 19, 2013

Method and apparatus for enhanced optical proximity correction

CHANG CHIA-CHENG29 citations88

YEN YUNG-SUNG

1 patent
US8677290B2Mar 18, 2014

Method of forming and using photolithography mask having a scattering bar structure

YEN YUNG-SUNG0 citations45