Inventor
YOSHIKAWA KOUTA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIKAWA KOUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOBAYASHI YASUSHI
2 patentsUS8716209B2May 6, 2014
Agent for post-etch treatment of silicon dielectric film, method of manufacturing semiconductor device, and semiconductor device
KOBAYASHI YASUSHI2 citations61
US8431464B2Apr 30, 2013
Process for producing silicic coating, silicic coating and semiconductor device
KOBAYASHI YASUSHI2 citations61