Inventor
LAUERHAAS JEFFREY M
US8 patents
⚠️ This page may combine multiple inventors who share the name “LAUERHAAS JEFFREY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL FSI INC
3 patentsUS9039840B2May 26, 2015
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
TEL FSI INC0 citations51
US8871108B2Oct 28, 2014
Process for removing carbon material from substrates
TEL FSI INC1 citations50
US10748788B2Aug 18, 2020
System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays
TEL FSI INC0 citations34
LAUERHAAS JEFFREY M
2 patentsUS8235062B2Aug 7, 2012
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
LAUERHAAS JEFFREY M18 citations89
US8684015B2Apr 1, 2014
Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
LAUERHAAS JEFFREY M4 citations70