Inventor
LAENGLE MARIO
DE8 patents
⚠️ This page may combine multiple inventors who share the name “LAENGLE MARIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL AG
3 patentsUS9904060B2Feb 27, 2018
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG5 citations82
US10168539B2Jan 1, 2019
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG3 citations71
US10578881B2Mar 3, 2020
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG0 citations50
ZEISS CARL SMT GMBH
2 patentsUS11647288B2May 9, 2023
Device for measuring masks for microlithography and autofocusing method
ZEISS CARL SMT GMBH0 citations59
US12158703B2Dec 3, 2024
Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method
ZEISS CARL SMT GMBH0 citations45