P

Inventor

ERICKSON JAMES J

US31 patents
⚠️ This page may combine multiple inventors who share the name “ERICKSON JAMES J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMITOOL INC

11 patents
US6976822B2Dec 20, 2005

End-effectors and transfer devices for handling microelectronic workpieces

SEMITOOL INC526 citations99
US7390383B2Jun 24, 2008

Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces

SEMITOOL INC17 citations92
US6673216B2Jan 6, 2004

Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing

SEMITOOL INC18 citations92
US7334826B2Feb 26, 2008

End-effectors for handling microelectronic wafers

SEMITOOL INC24 citations91
US7393439B2Jul 1, 2008

Integrated microfeature workpiece processing tools with registration systems for paddle reactors

SEMITOOL INC11 citations83
US7390382B2Jun 24, 2008

Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods

SEMITOOL INC13 citations83
US7281741B2Oct 16, 2007

End-effectors for handling microelectronic workpieces

SEMITOOL INC12 citations83
US7198694B2Apr 3, 2007

Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems

SEMITOOL INC16 citations81
US7313462B2Dec 25, 2007

Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces

SEMITOOL INC8 citations70
US7288172B2Oct 30, 2007

Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing

SEMITOOL INC0 citations52
US7288179B2Oct 30, 2007

Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing

SEMITOOL INC0 citations52

ULTIMED INC

11 patents

ERICKSON THOMAS E

7 patents

ULTI MED INC

2 patents