Inventor
WU TZU-HENG
TW11 patents
Patents
11 patentsUS10609463B2Mar 31, 2020
Integrated microphone device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations82
US10065852B2Sep 4, 2018
MEMS device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US11097941B2Aug 24, 2021
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11184694B2Nov 23, 2021
Integrated microphone device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10273140B2Apr 30, 2019
Substrate structure, semiconductor structure and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10087071B2Oct 2, 2018
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9446945B2Sep 20, 2016
Isolation structure for MEMS 3D IC integration
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9975754B2May 22, 2018
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9656855B1May 23, 2017
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9493346B2Nov 15, 2016
Capacitor with planarized bonding for CMOS-MEMS integration
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US9449867B2Sep 20, 2016
VHF etch barrier for semiconductor integrated microsystem
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41