Inventor
HULTERMANS RONALD JOHANNES
NL11 patents
⚠️ This page may combine multiple inventors who share the name “HULTERMANS RONALD JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS7106412B2Sep 12, 2006
Lithographic apparatus comprising a gas flushing system
ASML NETHERLANDS BV17 citations78
US9715174B2Jul 25, 2017
Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method
ASML NETHERLANDS BV2 citations71
US7446850B2Nov 4, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations70
US10990015B2Apr 27, 2021
Debris mitigation system, radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations60
US7764356B2Jul 27, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7136142B2Nov 14, 2006
Lithographic apparatus having a gas flushing device
ASML NETHERLANDS BV2 citations57
US9462667B2Oct 4, 2016
Radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US9964852B1May 8, 2018
Source collector apparatus, lithographic apparatus and method
ASML NETHERLANDS BV0 citations45
US9841680B2Dec 12, 2017
Source collector apparatus, lithographic apparatus and method
ASML NETHERLANDS BV0 citations45
US10750604B2Aug 18, 2020
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
ASML NETHERLANDS BV0 citations36