Inventor
CHEN JIN-DAH
TW9 patents
Patents
9 patentsUS10644134B2May 5, 2020
Gate formation with varying work function layers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10115796B2Oct 30, 2018
Method of pulling-back sidewall metal layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11387105B2Jul 12, 2022
Loading effect reduction through multiple coat-etch processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11830936B2Nov 28, 2023
Gate formation with varying work function layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11239345B2Feb 1, 2022
Gate formation with varying work function layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10755936B2Aug 25, 2020
Loading effect reduction through multiple coat-etch processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10276392B2Apr 30, 2019
Loading effect reduction through multiple coat-etch processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9711604B1Jul 18, 2017
Loading effect reduction through multiple coat-etch processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US11316033B2Apr 26, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50