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Inventor
TRYTKO TYLER
US
2 patents
Patents
2 patents
US10690599B1
Jun 23, 2020
Radiation-induced false count mitigation and detector cooling
KLA TENCOR CORP
2 citations
65
US9810619B2
Nov 7, 2017
Method and system for simultaneous tilt and height control of a substrate surface in an inspection system
KLA TENCOR CORP
0 citations
35