Inventor

ASADA MAKI

JP5 patents

Patents

5 patents

US11130883B2Sep 28, 2021

Polishing composition

FUJIMI INC0 citations57

US11332640B2May 17, 2022

Polishing composition and polishing method using same

FUJIMI INC0 citations54

US11939491B2Mar 26, 2024

Method of polishing object to be polished containing material having silicon-silicon bond

FUJIMI INC0 citations43

US9685341B2Jun 20, 2017

Abrasive composition and method for producing semiconductor substrate

FUJIMI INC0 citations39

US9650544B2May 16, 2017

Polishing composition, method for manufacturing polishing composition, and method for manufacturing polishing composition liquid concentrate

FUJIMI INC0 citations36